Abstract
A Si- and C-centered tetrahedron model is developed for the determination of the optical dielectric function ε=ε1+iε2 of amorphous silicon-carbon (a-Si1x Cx) alloys. The PhillipsVan VechtenLevine dielectric model, along with the scaling procedure of Aspnes and Theeten, is used to obtain predictions for ε1 and ε2 for the individual Si-Si4ν Cν and C-Si4ν Cν (ν=0–4) tetrahedra. The tetrahedron model then uses these tetrahedra as the components in the Bruggemann effective-medium approximation to obtain predictions for ε1 and ε2 for the a-Si1x Cx alloys. These predictions for ε1 and ε2, and for the optical energy-gap parameter Eopt, are obtained for three different types of chemical ordering in the films: (1) no chemical ordering, (2) complete chemical ordering with homogeneous dispersion, and (3) complete chemical ordering with phase separation. The predictions of this model are presented in detail in this paper and are compared with experimental results for ε1, ε2, and Eopt for a series of a-Si1x Cx:H alloys in the following paper.