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The effect of water on friction of MEMS
Home
Publications
The effect of water on friction of MEMS
The effect of water on friction of MEMS
MS
M. Scherge
M. Scherge
XL
X. Li
X. Li
JS
J.A. Schaefer
J.A. Schaefer
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1 January 1999
journal article
Published by
Springer Nature
in
Tribology Letters
Vol. 6
(3/4)
,
215-220
https://doi.org/10.1023/a:1019119925494
Abstract
No abstract available
Keywords
HYDROPHOBIC
HYDROPHILIC
ADHESIVE
MEMS
HUMIDITY
FUNCTION
THICKNESS
COVERAGE
FRICTION FORCE
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