A novel single chip thin film metal oxide array
- 27 May 2003
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 93 (1-3), 350-355
- https://doi.org/10.1016/s0925-4005(03)00218-1
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Microhotplate platforms for chemical sensor researchSensors and Actuators B: Chemical, 2001
- Micromachined metal oxide gas sensors: opportunities to improve sensor performanceSensors and Actuators B: Chemical, 2001
- Micromachined thin film SnO2 gas sensors in temperature-pulsed operation modeSensors and Actuators B: Chemical, 1999
- Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structureSensors and Actuators B: Chemical, 1998
- Silicon hotplates for metal oxide gas sensor elementsMicrosystem Technologies, 1997
- Low-power micro gas sensorSensors and Actuators B: Chemical, 1996
- Optimized temperature-pulse sequences for the enhancement of chemically specific response patterns from micro-hotplate gas sensorsSensors and Actuators B: Chemical, 1996
- A micromachined ultra-thin-film gas detectorIEEE Transactions on Electron Devices, 1994
- Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processingIEEE Electron Device Letters, 1993
- A New Detector for Gaseous Components Using Semiconductive Thin Films.Analytical Chemistry, 1962