Fragmentation spectra and appearance potentials of vacuum pump fluids determined by electron impact mass spectrometry

Abstract

Three different vacuum pump fluid (Fomblin Y-VAC 18/8, Santovac 5, and DC 704) vapors were subjected to electron bombardment at energies from 10 to 90 eV. The fragmentation spectra were recorded with a quadrupole mass spectrometer. The appearance potentials of the most abundant fragments were determined. The experimental results show very good stability of the Fomblin vapors under electron bombardment.