Some comments on electron-beam-induced adsorption
- 1 February 1977
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 10 (2), 243-248
- https://doi.org/10.1088/0022-3727/10/2/008
Abstract
Measurements are reported which demonstrate that an ion beam of significant intensity can be generated by an electron gun of the type commonly used in Auger electron spectroscopy. When adsorption experiments are performed in the presence of an electron beam, the ion beam produced simultaneously can significantly influence adsorption behaviour. As an example, the effect is illustrated for the GaAs-O2 system.Keywords
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