Electrical Resistivity of Tungsten Films Prepared by WF[sub 6] Reduction

Publisher Website

1 January 1969

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 116 (12), 1742-1745
https://doi.org/10.1149/1.2411692

Abstract

No abstract available

Keywords

Cited by 13 articles