Angular Distribution of Sputtered Potassium Atoms
- 1 August 1961
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 123 (3), 790-796
- https://doi.org/10.1103/physrev.123.790
Abstract
The angular distributions of potassium particles issuing from a potassium surface under bombardment by noble gas ions were observed under moderately good vacuum conditions. Sputtered potassium atoms were detected for incident ion energies above approximately 15 ev and useful observations of angular distributions were obtained for incident ion energies in the range 50 to 450 ev for all available values of the incident angle. A means was discovered for the discrimination between the total sputtered flux and that fraction of it possessing particle energies above a certain threshold. The apparatus and experimental procedures are described and the observed distribution patterns and a two-collision sputtering mechanism are discussed, along with related observations.Keywords
This publication has 13 references indexed in Scilit:
- Angular Distribution of Sputtered MaterialJournal of Applied Physics, 1960
- The ejection of atoms from gold crystals during proton irradiationPhilosophical Magazine, 1959
- Low-Energy Sputtering Yields in HgPhysical Review B, 1958
- Analysis of Low-Energy SputteringPhysical Review B, 1958
- Das elektrische Massenfilter als Massenspektrometer und IsotopentrennerZeitschrift für Physik, 1958
- Focusing in Collision Problems in SolidsJournal of Applied Physics, 1957
- Sputtering Yields for Normally Incident-Ion Bombardment at Low Ion EnergyPhysical Review B, 1957
- New Collision Theory of Cathode Sputtering of Metals at Low Ion EnergiesPhysical Review B, 1957
- Theory of the Sputtering ProcessPhysical Review B, 1956
- Sputtering of Alkali Atoms by Inert Gas Ions of Low EnergyPhysical Review B, 1954