Mass thickness measurement of pure element films by X-ray fluorescence spectroscopy
- 1 October 1977
- journal article
- research article
- Published by Wiley in X-Ray Spectrometry
- Vol. 6 (4), 187-191
- https://doi.org/10.1002/xrs.1300060406
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Simultaneous determination of composition and mass thickness of thin films by quantitative x-ray fluorescence analysisAnalytical Chemistry, 1977
- Lama I — A General Fortran Program for Quantitative X-ray Fluorescence AnalysisPublished by Springer Nature ,1977
- Eichprobenfreie Bestimmung der Massenbelegung ebener dünner Schichten mit einem energiedispersiven SpektrometerX-Ray Spectrometry, 1974
- A comparison of methods for accurate film thickness measurementJournal of Physics E: Scientific Instruments, 1972
- Thickness Measurements of Thin Permalloy Films: Comparison of X-Ray Emission Spectroscopy, Interferometry, and Stylus MethodsJournal of Vacuum Science and Technology, 1965
- Simultaneous determination of alloy film thickness and its composition with X-Ray fluorescent spectroscopyAnalytical and Bioanalytical Chemistry, 1962