Analysis of Materials by Electron-Excited Auger Electrons

Abstract

The energy spectra of Auger electrons emitted from many elements and alloys have been observed. Differentiation of the secondary electron‐energy distribution by perturbation and synchronous detection techniques, and suppression of the effects of low‐energy secondaries, were used to obtain well‐defined spectra. The Auger lines afford a sensitive indicator for light elements, though spectra for elements as heavy as gold have been obtained. Because the method examines only a superficial layer of the sample, it is useful for detecting contamination, surface migration, or segregation, and for diffusion studies. Cleaning of the surfaces is critical for useful analysis. Quantitative analysis is hindered by noise and the lack of known surface conditions for calibration.