The growth of epitaxial germanium films by triode sputtering
- 1 September 1967
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 1 (2), 169-172
- https://doi.org/10.1016/0040-6090(67)90013-2
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- The growth of single crystal films of silver on rocksalt by sputteringJournal of Materials Science, 1966
- Epitaxial Deposition of Germanium by Both Sputtering and EvaporationJournal of Applied Physics, 1966
- Growth of Sputtered vs Evaporated Metal FilmsJournal of Applied Physics, 1966
- A study of nucleation in chemically grown epitaxial silicon films using molecular beam techniquesPhilosophical Magazine, 1966
- Depths of Low-Energy Ion Bombardment Damage in GermaniumJournal of Applied Physics, 1966