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Etching of aluminum alloys in the transformer-coupled plasma etcher
Home
Publications
Etching of aluminum alloys in the transformer-coupled plasma etcher
Etching of aluminum alloys in the transformer-coupled plasma etcher
YR
Yunju Ra
Yunju Ra
SB
Stephen G. Bradley
Stephen G. Bradley
CC
Ching-Hwa Chen
Ching-Hwa Chen
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1 July 1994
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 12
(4)
,
1328-1333
https://doi.org/10.1116/1.579316
Abstract
No abstract available
Keywords
TRANSFORMER COUPLED
ALUMINUM ALLOYS
PLASMA ETCHER
ETCHING OF ALUMINUM
Cited by 37 articles