Measurement of the ionisation and attachment coefficients in monosilane and disilane
- 14 September 1986
- journal article
- Published by IOP Publishing in Journal of Physics D: Applied Physics
- Vol. 19 (9), L179-L182
- https://doi.org/10.1088/0022-3727/19/9/002
Abstract
The ionisation alpha /p0, electron attachment eta /p0 and effective ionisation alpha /p0(= alpha /p0- eta /p0) coefficients for monosilane (SiH4) and disilane (Si2H6) were measured by the steady-state Townsend method for 600150 V cm-1 Torr-1 and found to be less than 10-5.Keywords
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