Synthesis and Lithographic Characterization of Block Copolymer Resists Consisting of Both Poly(styrene) Blocks and Hydrosiloxane-Modified Poly(diene) Blocks
- 1 July 1994
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 6 (7), 927-934
- https://doi.org/10.1021/cm00043a011