Hydride vapor-phase epitaxial GaN thick films for quasi-substrate applications: Strain distribution and wafer bending
- 1 May 2004
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 33 (5), 389-394
- https://doi.org/10.1007/s11664-004-0189-4
Abstract
No abstract availableKeywords
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