Leaky SAW velocity on water/silicon boundary measured by acoustic line-focus beam

Abstract

Propagation characteristics of leaky SAWs at the boundary of water/silicon are investigated by the nonscanning reflection acoustic microscope using a line-focus beam. Experiments are performed for typical crystalline planes of silicon such as (111), (110), (001) and slightly inclined (111). These results obtained by the line-focus beam are compared to the experimental results obtained by the conventional point-focus beam.