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Influence of absorber stress on the precision of x-ray masks
Home
Publications
Influence of absorber stress on the precision of x-ray masks
Influence of absorber stress on the precision of x-ray masks
KM
K.-H. Müller
K.-H. Müller
PT
P. Tischer
P. Tischer
WW
W. Windbracke
W. Windbracke
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1 January 1986
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B
Vol. 4
(1)
,
230-234
https://doi.org/10.1116/1.583446
Abstract
No abstract available
Cited by 8 articles