Highly sensitive gas sensor based on integrated titania nanosponge arrays
- 6 March 2006
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 88 (10), 102904
- https://doi.org/10.1063/1.2185247
Abstract
Highly sensitive gas sensors were fabricated using nanostructured titania pad arrays. Nanostructured titania (NST) formed is sponge-like consisting of interconnected nanoscale wires and walls, which are made up of anatase nanocrystals. Electrical characterization indicates that contacts were ohmic and NST was highly sensitive to . Variations of hundreds of oxygen molecules over a NST square pad sensing element were detected at . The NST-based sensor operates at lower temperatures, has fast response time, and superior sensitivity relative to oxygen sensors based on porous undoped titania reported in the literature.
Keywords
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