Investigation on the structural and mechanical properties of anti-sticking sputtered tungsten chromium nitride films
- 1 February 2013
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 529, 333-337
- https://doi.org/10.1016/j.tsf.2012.09.036
Abstract
No abstract availableKeywords
Funding Information
- National Science Council (NSC 99-2221-E-451-004)
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