Replication of very small periodic gratings with proximity x-ray lithography
- 31 January 1994
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 23 (1-4), 239-242
- https://doi.org/10.1016/0167-9317(94)90146-5
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- Experimental and theoretical study of image bias in x-ray lithographyJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Application of an x-ray stepper for subquarter micrometer fabricationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1992
- Photoelectron effects in x-ray mask replicationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1991