Preparation and properties of tantalum pentoxide (Ta2O5) thin films for ultra large scale integrated circuits (ULSIs) application – A review
- 1 January 1999
- journal article
- review article
- Published by Springer Nature in Journal of Materials Science: Materials in Electronics
- Vol. 10 (1), 9-31
- https://doi.org/10.1023/a:1008970922635