Electronic properties of multiwalled carbon nanotubes in an embedded vertical array
- 29 July 2002
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 81 (5), 910-912
- https://doi.org/10.1063/1.1496494
Abstract
We demonstrate integration of carbon nanotubes into large scale vertically aligned electrode arrays, by filling the as-grown samples with conformal SiO 2 using chemical vapor deposition. Subsequent mechanical polishing yields a flat surface with only the very ends of the nanotube array exposed. The electronic properties of individual carbon nanotubes in the array are measured using current-sensing atomic force microscopy. These vertical nanotube arrays are suitable for fabricating various electronic devices and sensors.Keywords
This publication has 21 references indexed in Scilit:
- Ultrahigh-density nanotransistors by using selectively grown vertical carbon nanotubesApplied Physics Letters, 2001
- Logic Circuits with Carbon Nanotube TransistorsScience, 2001
- Carbon nanotube field-effect invertersApplied Physics Letters, 2001
- Carbon Nanotube Inter- and Intramolecular Logic GatesNano Letters, 2001
- Carbon Nanotube-Based Nonvolatile Random Access Memory for Molecular ComputingScience, 2000
- Crossed Nanotube JunctionsScience, 2000
- Scanning field emission from patterned carbon nanotube filmsApplied Physics Letters, 2000
- Nanotube Molecular Wires as Chemical SensorsScience, 2000
- Room-temperature transistor based on a single carbon nanotubeNature, 1998
- Fabrication and Evaluation of Nanoelectrode EnsemblesAnalytical Chemistry, 1995