Replica molding using polymeric materials: A practical step toward nanomanufacturing
- 1 February 1997
- journal article
- research article
- Published by Wiley in Advanced Materials
- Vol. 9 (2), 147-149
- https://doi.org/10.1002/adma.19970090211
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Imprint Lithography with 25-Nanometer ResolutionScience, 1996
- Device Fabrication by Scanned Probe OxidationScience, 1995
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995
- Integrated micro-scanning tunneling microscopeApplied Physics Letters, 1995
- Template Synthesis of Electronically Conductive Polymer NanostructuresAccounts of Chemical Research, 1995
- Nanolithography with an atomic force microscope for integrated fabrication of quantum electronic devicesApplied Physics Letters, 1994
- Fabrication of Si nanostructures with an atomic force microscopeApplied Physics Letters, 1994
- Formation of Nanometer-Scale Grooves in Silicon with a Scanning Tunneling MicroscopeScience, 1993
- Absence of resolution degradation in X-ray lithography for λ from 4.5nm to 0.83nmMicroelectronic Engineering, 1990
- Semiconductor LithographyPublished by Springer Nature ,1988