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Chemical Vapor Deposition of Silicon Nitride
Home
Publications
Chemical Vapor Deposition of Silicon Nitride
Chemical Vapor Deposition of Silicon Nitride
JG
J. J. Gebhardt
J. J. Gebhardt
RT
R. A. Tanzilli
R. A. Tanzilli
TH
T. A. Harris
T. A. Harris
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1 October 1976
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 123
(10)
,
1578-1582
https://doi.org/10.1149/1.2132642
Abstract
No abstract available
Keywords
RADOMES
INFRARED RADIATION
FLEXURAL STRENGTH
REFLECTANCE
THERMAL EXPANSION
VAPOR DEPOSITION
PROCESSING
CRYSTALS
FRACTURE MECHANICS
MICROSTRUCTURE
HARDNESS
MODULUS OF ELASTICITY
Cited by 23 articles