Preparation of Conductive SrMoO3 Thin Films and Their Application to Electrodes for Thin Film Capacitors

Abstract

Perovskite SrMoO₃ thin films are prepared by RF magnetron sputtering at substrate temperatures above 600°C. They show metallic conduction, and their resistivity at 300 K is (1.5∼1.8)×10^-4Ω·cm. The tri-layered capacitor fabricated from SrMoO₃ (base electrode) –SrTiO₃ (dielectric layer)–Cu (counter electrode) has a capacitance of about 0.8 µF/cm² at 1 kHz and 30°C, where the thickness of the SrTiO₃ layer is 700Å.