VUV fluorescence diagnostics of sputtered oxygen and carbide materials
- 1 December 1990
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 176-177, 1055-1058
- https://doi.org/10.1016/0022-3115(90)90191-o
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
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