Nanofabrication with scanning nanonozzle ‘Nanojet’
- 30 September 2001
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 57-58, 1035-1042
- https://doi.org/10.1016/s0167-9317(01)00447-6
Abstract
No abstract availableKeywords
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