Tunnelströme durch Al2O3-Schichten bei Kontakten verschiedener Austrittsarbeiten

Abstract

The tunneling current through Al₂O₃-layers of a thickness varying between 30 and 100 Å was measured for In-Al₂O₃-Al, Al-Al₂O₃-Al, and Au-Al₂O₃-Al layer cells. The dependence of the observed current on the applied voltage, the thickness of the Al₂O₀₃-layer, and temperature is in agreement with an analysis of tunneling currents through insulating films by STRATTON. By comparing the experimental data with the analytical expressions the following values are derived for the metal-Al₂O₃ work function: In: 0.55 eV; Al: 0.77 eV; Au: 1.6 eV.