Effects of Aluminum Electrode and Hydrogen Gas during Heat Treatments on MOS Structure
- 1 September 1966
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 5 (9)
- https://doi.org/10.1143/jjap.5.841
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Effects of Heat Treatment on Thermally Oxidized SiliconJapanese Journal of Applied Physics, 1966
- Lateral AC current flow model for metal-insulator-semiconductor capacitorsIEEE Transactions on Electron Devices, 1965