Electrical properties of polyimide films implanted with nitrogen and argon
- 1 February 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 37-38, 720-723
- https://doi.org/10.1016/0168-583x(89)90283-8
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Ion beam irradiated via-connect through an insulating polymer layerJournal of Applied Physics, 1984
- Ion-beam-induced conductivity in polymer filmsJournal of Applied Physics, 1983
- Electrical properties of ion‐implanted poly(p‐phenylene sulfide)Journal of Polymer Science: Polymer Physics Edition, 1983
- Large conductivity changes in ion beam irradiated organic thin filmsApplied Physics Letters, 1982