Characterization of double-layer transparent films on absorbing substrates using multiple-angle ellipsometry
- 1 June 1991
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 47 (4), 229-309
- https://doi.org/10.1016/0169-4332(91)90083-v
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- A new method for ellipsometric inversion with microcomputers: Characterization of optically absorbing films using multiple-angle-of-incidenceSurface Science, 1989
- Numerical method for the ellipsometric determination of optical constants and thickness of thin films with microcomputersSurface Science, 1988
- Method for numerical inversion of the ellipsometry equation for transparent filmsJournal of the Optical Society of America, 1983
- A four-phase complex refractive index model of ion-implantation damage: Optical constants of phosphorus implants in siliconJournal of Applied Physics, 1981
- Thin film coatings: algorithms for the determination of reflectance and transmittance, and their derivativesApplied Optics, 1979
- Implications of three parameter solutions to the three-layer modelSurface Science, 1976
- Ellipsometric analyses for an absorbing surface film on an absorbing substrate with or without an intermediate surface layerSurface Science, 1976
- Present status of automatic ellipsometersSurface Science, 1976
- Ellipsometer Data Analysis with a Small Programmable Desk CalculatorApplied Optics, 1972
- Ellipsometry of a Transparent Film Overlaid on a Transparent Substrate Having a Surface LayerOptica Acta: International Journal of Optics, 1970