Deflection beam-chopping in the SEM
- 1 March 1977
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 10 (3), 229-236
- https://doi.org/10.1088/0022-3735/10/3/014
Abstract
Beam-chopping in the scanning electron microscope (SEM) by electrostatic deflection over an aperture is examined in some detail. The chopping aperture used is the final aperture image and the beam is of finite diameter. The required deflection angle to cut off the beam and the apparent movement of the spot due to the deflection in chopping are obtained for the cases of the deflection structure placed between the gun and the top lens and between the gun and the other lens.Keywords
This publication has 5 references indexed in Scilit:
- A rotationally symmetric electron beam chopper for picosecond pulsesJournal of Physics E: Scientific Instruments, 1976
- Electron gun for generation of subnanosecond electron packets at very high repetition rateReview of Scientific Instruments, 1976
- Probing Gunn domains at X-band microwave frequencies using a scanning microscopeJournal of Physics D: Applied Physics, 1974
- High Speed Beam Deflection and Blanking for Electron LithographyJournal of Vacuum Science and Technology, 1973
- A new type of traveling-wave deflection systemIEEE Transactions on Electron Devices, 1972