Proximity-compensated blazed transmission grating manufacture with direct-writing, electron-beam lithography
- 1 January 1994
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 33 (1), 103-107
- https://doi.org/10.1364/ao.33.000103
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.This publication has 6 references indexed in Scilit:
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