Plasma Polymerized Membranes for Isfet's

Abstract
A new type of membrane for ion sensitive field effect transistors (ISFET's) made by plasma polymerization has been proposed for electrode material. Tetrafluoroethylene, chlorobenzene, acetonitrile pure and doped with iodine served as monomers. Some structural features of the plasma polymer membranes are analyzed by ESCA- and IR- methods. Ion sensitivity and long term stability of the membrane are examined.