AES-SIMS(IMA)study of physical and chemical sputtering processesof low-Z materials by energetic ions
- 1 December 1979
- journal article
- Published by Elsevier in Journal of Nuclear Materials
- Vol. 85-86, 1185-1189
- https://doi.org/10.1016/0022-3115(79)90422-7
Abstract
No abstract availableKeywords
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