TiN coatings on M2 steel produced by plasma-assisted chemical vapor deposition
- 1 November 1987
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 154 (1-2), 377-386
- https://doi.org/10.1016/0040-6090(87)90380-4
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
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