Composition, morphology and mechanical properties of plasma-assisted chemically vapor-deposited TiN films on M2 tool steel
- 1 June 1986
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 139 (3), 247-260
- https://doi.org/10.1016/0040-6090(86)90055-6
Abstract
No abstract availableKeywords
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