A simple, high performance piezoresistive accelerometer
- 9 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- The mechanism of anisotropic, electrochemical silicon etching in alkaline solutionsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1990
- Vertical Etching of Silicon at very High Aspect RatiosAnnual Review of Materials Science, 1979