Molecular Design and Synthesis of 3-Oxocyclohexyl Methacrylate for ArF and KrF Excimer Laser Resist
- 1 September 1994
- journal article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 6 (9), 1492-1498
- https://doi.org/10.1021/cm00045a004