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Hydrogen in III-V Compound Semiconductors
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Hydrogen in III-V Compound Semiconductors
Hydrogen in III-V Compound Semiconductors
Stephen J. Pearton
Stephen J. Pearton
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1 December 1993
journal article
Published by
Trans Tech Publications, Ltd.
in
Materials Science Forum
Vol. 148-149
,
393-480
https://doi.org/10.4028/www.scientific.net/msf.148-149.393
Abstract
No abstract available
Keywords
CH4/H2
CLEANING
DEEP LEVEL
DOPANT PASSIVATION
DRY ETCHING
ECR
GAAS
GROWTH
HBR/H2
HL/H2
HYDROGEN
INGAAS
INP
PROCESS
WET ETCHING
Cited by 12 articles