Rankings
Publications
Search Publications
Cited-By Search
Sources
Publishers
Scholars
Scholars
Top Cited Scholars
Organizations
About
Login
Register
Home
Publications
Chemical vapor deposition of aluminum from trimethylamine-alane
Home
Publications
Chemical vapor deposition of aluminum from trimethylamine-alane
Chemical vapor deposition of aluminum from trimethylamine-alane
DB
David B. Beach
David B. Beach
SB
Samuel E. Blum
Samuel E. Blum
FL
Francoise K. LeGoues
Francoise K. LeGoues
Publisher Website
Google Scholar
Add to library
Cite
Download
Share
Download
1 September 1989
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 7
(5)
,
3117-3118
https://doi.org/10.1116/1.576322
Abstract
No abstract available
Cited by 64 articles