The back scattering of electrons by crystals at low and high energies

Abstract

Electron scattering can be used as a tool for the study of crystalline surfaces, and for the study of defects in the région of the surface, at all energies. It is shown that contrast from diffraction effects appears in all parts of the secondary électron spectrum. This permits a variety of measurements of both the elastic and inelastic back scattered current to be used for metallurgical studies, especially in the high resolution scanning électron microscope at high électron energies. Scanning techniques at low énergies should also prove useful, and évidence is presented for the existence of similar effects down to 100 eV