Smoothing of chemically vapour deposited diamond films by ion beam irradiation
- 1 May 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 212 (1-2), 43-48
- https://doi.org/10.1016/0040-6090(92)90498-z
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Processing of CVD diamond films by YAG laser.Journal of the Japan Society for Precision Engineering, 1990
- On the performance of diamond film polishing apparatus developed.Journal of the Japan Society for Precision Engineering, 1989
- Etching of diamond with argon and oxygen ion beamsJournal of Vacuum Science & Technology A, 1984