Material Characteristics of Spin‐On Glasses for Interlayer Dielectric Applications

Publisher Website

1 November 1987

journal article
Published by The Electrochemical Society in Journal of the Electrochemical Society

Vol. 134 (11), 2829-2834
https://doi.org/10.1149/1.2100297

Abstract

No abstract available

Keywords

SPIN ON GLASS

Cited by 36 articles