Improved fabrication approach for carbon nanotube probe devices
- 13 November 2000
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 77 (21), 3453-3455
- https://doi.org/10.1063/1.1328046
Abstract
An improved process is developed for simple and efficient fabrication of carbon nanotube probe devices. This process requires only two steps to make nanotube probes. First a nanotube cartridge is created using chemical vapor deposition, then the nanotubes are transferred from the cartridge to a device using an electric field. Multiwall nanotube probes are made into different device geometries in this approach. Their applications are illustrated by atomic force microscopy imaging of the surface of a terrestrial rock granule selected to simulate the morphology and consistency of a grain of Mars dust and nanolithography on a silicon substrate.Keywords
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