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Thermal Stress in CVD PSG and SiO2 Films on Silicon Substrates
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Thermal Stress in CVD PSG and SiO2 Films on Silicon Substrates
Thermal Stress in CVD PSG and SiO2 Films on Silicon Substrates
MS
M. Shimbo
M. Shimbo
TM
T. Matsuo
T. Matsuo
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1 January 1983
journal article
Published by
The Electrochemical Society
in
Journal of the Electrochemical Society
Vol. 130
(1)
,
135-138
https://doi.org/10.1149/1.2119640
Abstract
No abstract available
Cited by 23 articles