High-performance poly-Si TFTs with ECR-plasma hydrogen passivation
- 1 March 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 36 (3), 529-533
- https://doi.org/10.1109/16.19964
Abstract
No abstract availableThis publication has 22 references indexed in Scilit:
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