Physical and electrical properties of yttria-stabilized zirconia epitaxial thin films deposited by ion beam sputtering on silicon
- 1 August 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 175, 23-28
- https://doi.org/10.1016/0040-6090(89)90803-1
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Initial stages of oxidation of Si{100}(2 × 1): A combined vibrational (EELS) and electron binding energy (XPS) studySurface Science, 1985
- Si on Cubic ZirconiaJournal of the Electrochemical Society, 1983