Sub-100 nm electronic devices and quantum-effects research using x-ray nanolithography
- 30 April 1990
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 11 (1-4), 53-59
- https://doi.org/10.1016/0167-9317(90)90072-2
Abstract
No abstract availableKeywords
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