Design of linear-motion microactuators using piezoelectric thin films
- 1 December 1991
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 1 (4), 247-252
- https://doi.org/10.1088/0960-1317/1/4/006
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- High-displacement piezoelectric actuator utilizing a meander-line geometry II. TheoryIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1991
- A linear piezoelectric stepper motor with submicrometer step size and centimeter travel rangeIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1990