Influence of substrate and target temperatures on properties of transparent and conductive doped ZnO thin films prepared by r.f. magnetron sputtering
- 1 April 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 171 (2), 307-311
- https://doi.org/10.1016/0040-6090(89)90637-8
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology
This publication has 7 references indexed in Scilit:
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